Polymer based tunneling sensor

Details Polymer based tunneling sensor Polymer based tunneling sensor

2006-08-22

2006-08-22

Picardat, Kevin M. (Department: 2822)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S063000, C438S066000, C438S082000

Reexamination Certificate

active

07094622

ABSTRACT:
A process for fabricating a polymer based circuit by the following steps. A mold of a design is formed through a lithography process. The design is transferred to a polymer substrate through a hot embossing process. A metal layer is then deposited over at least part of said design and at least one electrical lead is connected to said metal layer.

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