Polyloaded optical waveguide devices and methods for making...

Details Polyloaded optical waveguide devices and methods for making... Polyloaded optical waveguide devices and methods for making...

2005-05-10

2005-05-10

Fureman, Jared J. (Department: 2876)

Optical waveguides

Integrated optical circuit

C385S129000, C385S131000, C385S141000

Reexamination Certificate

active

06891985

ABSTRACT:
A passive optical waveguide device deposited on a wafer that includes an insulator layer and an upper semiconductor layer formed at least in part from silicon. The upper silicon layer forms at least part of an optical waveguide, such as a slab waveguide. The passive optical waveguide device includes an optical waveguide, a gate oxide, and a polysilicon layer. The polysilicon layer projects a region of static effective mode index within the optical waveguide having a different effective mode index than the optical waveguide outside of the region of the static effective mode index. The region of static effective mode index has a depth extending within the optical waveguide. The value and position of the effective mode index within the region of static effective mode index remains substantially unchanged over time.

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