Polyimide capacitive humidity sensing element

Details Polyimide capacitive humidity sensing element Polyimide capacitive humidity sensing element

1987-06-23

1988-08-02

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

H01G 700, G01N 2712

Patent

active

047617101

ABSTRACT:
The present invention relates to a humidity sensing element having a polyimide moisture sensing film. It is of a capacitive structure containing, without the use of adhesives, a polyimide film which is either sandwiched between a corrosion resisting metal substrate and a thin moisture permeable gold layer, or vapor deposited on both sides thereof with a moisture permeable thin gold layer.

REFERENCES:
patent: 3983527 (1976-09-01), Ohsato et al.
patent: 4164868 (1979-08-01), Suntola
patent: 4305112 (1981-12-01), Heywang et al.
patent: 4345301 (1982-08-01), Nelson
patent: 4696796 (1987-09-01), Oka et al.

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