Polyhydric phenol compound and positive resist composition compr

Details Polyhydric phenol compound and positive resist composition compr Polyhydric phenol compound and positive resist composition compr

1995-04-18

1996-12-24

Chan, Nicky

Organic compounds -- part of the class 532-570 series

Organic compounds

Heterocyclic carbon compounds containing a hetero ring...

C07D31160

Patent

active

055874924

ABSTRACT:
A polyhydric phenol compound of the formula: ##STR1## wherein R.sub.1 to R.sub.5 are independently a hydrogen atom, an alkyl group, an alkenyl group, a cycloalkyl group or an aryl group, provided that at least one of R.sub.1 and R.sub.2 is an alkyl group, an alkenyl group, a cycloalkyl group or an aryl group, and its quinone diazide sulfonate which gives a positive resist composition having improved sensitivity and a good depth of focus.

REFERENCES:
patent: 5059507 (1991-10-01), Uetani et al.

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