Polycrystalline silicon rod for zone reflecting and a...

Stock material or miscellaneous articles – Composite – Of silicon containing

Reexamination Certificate

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C264S081000, C423S348000, C423S349000, C423S350000, C427S248100, C428S448000

Reexamination Certificate

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07939173

ABSTRACT:
The invention relates to a polysilicon rod for FZ applications obtainable by deposition of high-purity silicon from a silicon-containing reaction gas, which has been thermally decomposed or reduced by hydrogen, on a filament rod. The polysilicon rod contains, surrounding the filament rod, an inner zone having but few needle crystals, small in size, an outer zone having a relatively small amount of larger needle crystals, and a smooth transition zone between the inner and outer zones. The polysilicon rods are obtained in high yield and can be refined in one pass in an FZ process.

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patent: 4426408 (1984-01-01), Dietze
patent: 5310531 (1994-05-01), Ikeda et al.
patent: 5976481 (1999-11-01), Kubota et al.
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patent: 6676916 (2004-01-01), Keck et al.
patent: 2003/0015078 (2003-01-01), Taylor
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patent: 2008/0053232 (2008-03-01), Hegen et al.
patent: 1194624 (1998-09-01), None
patent: 27 27 305 (1979-01-01), None
patent: 3107260 (1982-09-01), None
patent: 10 2006 040 486 (2008-03-01), None
patent: 0 445 036 (1998-07-01), None
Machine English Translation of DE 2727305 provided by the EPO website, Retrieval date of Sep. 22, 2010.
English Abstract corresponding to DE 27 27 305, published Jan. 4, 1979.
Schumann et al., Metallografie (Meetallography), Wiley-VCH, 2005, 14th Edition, 5 pgs.

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