Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Patent
1991-04-08
1993-05-25
LaRoche, Eugene R.
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Passive components in ics
257773, 257 49, H01L 2702, H01L 2122
Patent
active
052144976
ABSTRACT:
A semiconductor device including a polycrystalline silicone resistor which has a resistance of 40 k.OMEGA.-800 k.OMEGA. and which is formed by a polycrystalline silicon film having a specific resistivity of 0.01 .OMEGA..cm-0.1 .OMEGA..cm. The resistor having the above resistance, which has previously been difficult to fabricate, can be fabricated with a high accuracy, so it is very useful for several kinds of semiconductor integrated circuits such as bipolar memory.
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Kondo Masao
Nakamura Tohru
Nanba Mitsuo
Shiba Takeo
Hitachi , Ltd.
LaRoche Eugene R.
Nguyen Viet Q.
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