Polycrystal silicon rod having an improved morphyology

Details Polycrystal silicon rod having an improved morphyology Polycrystal silicon rod having an improved morphyology

1998-05-27

1999-05-18

Edwards, Newton

Stock material or miscellaneous articles

Coated or structually defined flake, particle, cell, strand,...

Rod, strand, filament or fiber

423348, 423349, D02G3/00

Patent

active

059049812

ABSTRACT:
A cylindrical polycrystal silicon rod formed of a high-purity polycrystal silicon, characterized in that a crystal having a grain diameter smaller than that of a crystal at a location where the distance from the center of deposition is 50% of the length from the center of deposition is existent in an area where the distance from the center of deposition toward the periphery is more than 50% of the length in the same lengthwise direction.

REFERENCES:
patent: 4094730 (1978-06-01), Rahilly
patent: 4150168 (1979-04-01), Yatsurugi et al.
patent: 4255463 (1981-03-01), Rucha et al.
patent: 4886647 (1989-12-01), Ikeda et al.
patent: 5499598 (1996-03-01), Oda

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