Polyalkylene oxide porogens having hyper-branches and low...

Details Polyalkylene oxide porogens having hyper-branches and low... Polyalkylene oxide porogens having hyper-branches and low...

2005-07-05

2005-07-05

Barts, Samuel (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Silicon containing

C556S450000

Reexamination Certificate

active

06914147

ABSTRACT:
The present invention relates to polyalkylene oxide porogens having hyper-branches and low dielectric-constant insulators using them. More particularly, the present invention relates to polyalkylene oxide porogens having hyper-branches expressed by the following formula (1), where the polyalkylene oxide porogen has a center molecular (D) having branches (W), and low dielectric-constant insulators having nanopores prepared by coating a mixture of the porogen and a high heat-resistant resin such as polysilsesquioxane and thermal treating the coated substrate at a temperature effective to degrade the porogen.in-line-formulae description="In-line Formulae" end="lead"?DY—W)l  (1)in-line-formulae description="In-line Formulae" end="tail"?

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