Poly(silyl silane)homo and copolymers

Details Poly(silyl silane)homo and copolymers Poly(silyl silane)homo and copolymers

1986-10-31

1989-04-11

Marquis, Melvyn I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

528 10, 528 25, 556430, 430 72, 430323, C08G 7704

Patent

active

048207888

ABSTRACT:
Poly(silyl silanes) have been prepared. They have high photosensitivity and excellent resistance to oxygen-reactive ion etching processes. They are useful as photodepolymerizable photoresists, barrier layers, etc.

REFERENCES:
patent: 2563005 (1951-08-01), Clark
patent: 4052430 (1977-10-01), Yajima et al.
patent: 4464460 (1984-08-01), Hiraoka et al.
patent: 4472591 (1984-09-01), Schilling, Jr. et al.
patent: 4569953 (1986-02-01), West et al.
patent: 4587205 (1986-05-01), Harrah et al.
patent: 4588801 (1986-05-01), Harrah et al.
patent: 4727170 (1988-02-01), Nagai et al.
Chemical Abstracts, 109:101837c;
Chemical Abstracts, 109:191128z.
Chemical Abstracts 109:101837c, CA Selects: Organosilicon Chemistry, Issue 19, 1988, pg. 32.
Indriksons et al. JACS 92:22, 11/4/70, 6704.
West et al., JACS 94:17, 8/23/72, 6110.
CA Selects: Organosilicon Chemistry, Issue 21, 1985, pg. 27 #103:132441Z.
Ishikawa and Kumada, M., "Photolysis of Permeated Linear and Branched-chain Polysilanes", 1971, pg. 489 of Chemical Comm.
Ishikawa, Yamakaka et al., "Photolysis of Organopolysilanes, Synthesis and Photochemical . . . ", pp. 167-176, 1985.
Gasper et al., "Laser Photolysis of 2-phenylheptamethyltrisilane" Chemical Physics Letters, vol. 105, No. 2, Mar. 1984, pp. 153-157.
Zeigler, Harrah & Johnson, "Self-developing polysilane deep-UV resists--photochemistry . . . ", SPIE, vol. 539, (1985), pp. 166-174.

Affiliated with

Also associated with

Rating

Poly(silyl silane)homo and copolymers does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Poly(silyl silane)homo and copolymers, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Poly(silyl silane)homo and copolymers will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-667966