Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – From phenol – phenol ether – or inorganic phenolate
Reexamination Certificate
2007-07-17
2007-07-17
Zemel, Irina S. (Department: 1711)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
From phenol, phenol ether, or inorganic phenolate
C528S362000, C528S363000, C528S327000, C528S272000, C528S288000, C528S332000, C428S457000, C428S458000, C428S473500, C428S411100, C525S420000, C525S422000, C525S434000
Reexamination Certificate
active
10609453
ABSTRACT:
A dielectric for aluminum and copper metalizations is stable at high temperatures. Surprisingly, in spite of the elimination of water during the cyclization, the polymeric dielectrics are very suitable for filling narrow trenches. The filled trenches exhibit no defects and bubbles or cracks. The polybenzoxazoles have dielectric constants of k≦2.7 and are suitable as an electrical insulator. Furthermore, these materials adhere very well on all surfaces relevant for micro-electronics.
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Halik Marcus
Lowack Klaus
Maltenberger Anna
Sezi Recai
Walter Andreas
Greenberg Laurence A.
Infineon - Technologies AG
Locher Ralph E.
Stemer Werner H.
Zemel Irina S.
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