Polishing system

Details Polishing system Polishing system

2005-09-28

2009-06-23

Eley, Timothy V (Department: 3724)

Abrading

Flexible-member tool, per se

Laminate

C451S550000

Reexamination Certificate

active

07549914

ABSTRACT:
The disclosed invention is directed to an improved polishing system that can attain improved values in surface topography, and in particular, improved surface planarity of a polished substrate. The system can prevent the formation of deformities at the polishing surface of the system. The system includes openings that are adjacent certain layers of the system. In particular, the system includes openings, such as channels, for example, formed adjacent to an adhesive layer in the system. Thus, as gases, e.g., air, are released from the semi-solid adhesive during operation of the system, the gases can be trapped, dissipated, or vented by the openings rather than form pressure points in the system that can lead to surface deformations on the polishing surface.

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