Polishing system

Details Polishing system Polishing system

1998-11-06

2000-08-22

Scherbel, David A.

Abrading

Abrading process

Glass or stone abrading

451 11, 451 66, 451287, 451288, B24B 100

Patent

active

06106369&

ABSTRACT:
A polishing system comprises: a rotating mounting table 14 which is rotatable while holding an object W to be polished; a rotating polishing plate 28 which has a smaller diameter than that of the rotating mounting table and which is provided with an abrasive layer 30 on the surface thereof; a scanning mechanism 26 for moving the rotating polishing plate in radial directions of the rotating mounting table while pressing the abrasive layer on the object; and abrasive solution supply means 46 for supplying an abrasive solution to the surface of the object. Thus, the system can be decreased in size, and the polished quantity can be partially controlled.

REFERENCES:
patent: 4481738 (1984-11-01), Tabuchi
patent: 4771578 (1988-09-01), Jorgensen et al.
patent: 5299389 (1994-04-01), Yohana et al.
patent: 5674115 (1997-10-01), Yamashita et al.
patent: 5725414 (1998-03-01), Moinpour et al.
patent: 5827111 (1998-10-01), Ball
patent: 5944582 (1999-08-01), Talieh

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