Polishing slurry and polishing process using the same

Details Polishing slurry and polishing process using the same Polishing slurry and polishing process using the same

1996-09-10

1998-01-20

Smith, James G.

Abrading

Abrading process

Glass or stone abrading

451 28, B24B 100, B24B 719, B24B 730

Patent

active

057095884

ABSTRACT:
A polishing slurry used for a process of polishing a workpiece by bringing the workpiece in sliding-contact with a polishing plate supplied with the slurry, and a polishing process using the slurry. The slurry includes polishing particles treated with a surface finishing agent having at least a carboxyl group containing material, an amino group containing material, and a sulfonic acid group containing material. The slurry is effective to polish a workpiece without occurrence of scratches on the surface of the workpiece.

REFERENCES:
patent: 3615739 (1971-10-01), Varsanyi et al.
patent: 5137541 (1992-08-01), Foster
patent: 5575885 (1996-11-01), Hirabayashi et al.

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