Polishing slurry

Details Polishing slurry Polishing slurry

2006-08-29

2006-08-29

Marcheschi, Michael (Department: 1755)

Abrasive tool making process, material, or composition

With synthetic resin

C051S308000, C051S309000, C051S307000, C106S003000

Reexamination Certificate

active

07097677

ABSTRACT:
Polishing slurry has abrading particles dispersed in a liquid dispersant. The abrading particles are composite particles each having a first particle and a plurality of second particles smaller than the first particles attached to the surface of the first particle through a metal oxide membrane. The first particles have average diameter of 0.1–20 μm and the second particles have average diameter of 0.001–0.5 μm. Elastic particles may be used as the first particles such as polymer particles.

REFERENCES:
patent: 6582761 (2003-06-01), Nishimoto et al.
patent: 2002/0006728 (2002-01-01), Matsui et al.
patent: 1104778 (2001-06-01), None
patent: 58-31241 (1983-03-01), None
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patent: 2001-300843 (2001-10-01), None
patent: 2002-30271 (2002-01-01), None
patent: 2002-80825 (2002-03-01), None
patent: 2002-97456 (2002-04-01), None

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