Polishing slurry

Details Polishing slurry Polishing slurry

2011-05-24

2011-05-24

Norton, Nadine G (Department: 1713)

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Etching or brightening compositions

Reexamination Certificate

active

07947195

ABSTRACT:
The present invention discloses a polishing slurry, wherein said polishing slurry comprises a carrier and functionalized alumina grains. The polishing slurry, which comprises functionalized alumina grains having desirable dispersibility, has desirable stability and is able to lower the defect rate of the substrate surface, improve the surface quality, decrease the total metal loss and enlarge the variation range of the technical parameters.

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International Search Report dated Jul. 20, 2006.

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