Stock material or miscellaneous articles – Pile or nap type surface or component – Nap type surface
Patent
1987-07-30
1988-06-28
Dawson, Robert A.
Stock material or miscellaneous articles
Pile or nap type surface or component
Nap type surface
156153, 156154, 156246, 156249, 156289, 428160, 4283171, 4283197, 428409, B32B 3300
Patent
active
047538384
ABSTRACT:
A process and product by process of making a polishing sheet material especially useful in the polishing of silicon wafer is disclosed. There is known a process of producing a poromeric suede-like polyurethane layer which comprises applying a solution of polyurethane on an impermeable synthetic resin film, subjecting the polyurethane layer to wet coagulation to form a honeycomb-like cellular structure of polyurethane on the synthetic resin film, removing the synthetic resin film from the cellular polyurethane layer, and abrading a thin surface skin of the cellular layer to form the poromeric suede-like polyurethane layer. In the present invention, a supporting layer made of a non-poromeric, soft synthetic resin sheet having good flatness is joined to a reverse side of the suede-like polyurethane layer to form a polishing sheet material.
REFERENCES:
patent: 2896304 (1959-07-01), Peroni
patent: 3284274 (1966-11-01), Hulslander et al.
patent: 3524791 (1970-08-01), Bethman et al.
patent: 3577507 (1971-05-01), Corbett
patent: 3719549 (1973-03-01), Mittman
patent: 3876491 (1975-04-01), Martel
patent: 3914492 (1975-10-01), Wisotzky et al.
Kimura Tsuguji
Watanabe Shin-ichi
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