Polishing sheet and polishing work method

Details Polishing sheet and polishing work method Polishing sheet and polishing work method

2007-05-22

2007-05-22

Chevalier, Alicia (Department: 1772)

Stock material or miscellaneous articles

Structurally defined web or sheet

Continuous and nonuniform or irregular surface on layer or...

C428S141000, C428S312200, C428S314400, C428S317900

Reexamination Certificate

active

10642280

ABSTRACT:
The present invention provides a polishing sheet that can secure a flatness of a material to be polished and can improve a polishing efficiency. A polishing pad1has a polyurethane sheet2made of polyurethane resin. The polyurethane sheet2has large cells3with a generally triangular sectional configuration rounded along a thickness direction thereof. Polyurethane resin exists in the polyurethane sheet2in a partition wall manner and fine foams4are formed in the polyurethane resin. Fine particles5added during manufacture of the polyurethane sheet2exist inside some of the fine foams4and the fine particles5are separable from the fine foams. By separating off fine particles positioned at a polishing face P by dummy polishing or the like, fine foams which evenly reserve a polishing liquid containing abrasive particles are formed at the polishing face P.

REFERENCES:
patent: 3653859 (1972-04-01), Zimmer et al.
patent: 5578362 (1996-11-01), Reinhardt et al.
patent: 6120361 (2000-09-01), Konishi et al.
patent: 05-008178 (1993-01-01), None
patent: 10/249709 (1998-09-01), None
patent: 2001-001270 (2001-01-01), None

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