Polishing sheet and manufacturing method of elastic plastic...

Coating processes – With post-treatment of coating or coating material – Chemical agent applied to treat coating

Reexamination Certificate

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Reexamination Certificate

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07976901

ABSTRACT:
A polishing sheet which can improve waviness at a face of a material to be polished and which has a long life is provided. The polishing pad1has a polyurethane sheet2made of polyurethane resin. The polyurethane sheet2has a polishing layer which is disposed inside a surface layer and which is allowed to wear away by polishing and whose thickness is larger than a thickness of the surface layer. The polishing layer has an approximately uniform foam structure in a direction of the thickness of the polishing sheet2by being formed foams whose space volume is larger than that of foams formed at the surface layer and which are communicated so as to form a network by continuous holes.

REFERENCES:
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patent: 4927432 (1990-05-01), Budinger et al.
patent: 5094670 (1992-03-01), Imada
patent: 6913517 (2005-07-01), Prasad
patent: 2001/0050268 (2001-12-01), Reinhardt
patent: 2005/0026552 (2005-02-01), Fawcett et al.
Patent Abstracts of Japan, Publication No. 05-008178, published Jan. 19, 1993, Naoto Kubo.
Patent Abstracts of Japan, Publication No. 10-249709, published Sep. 22, 1998, Hajime Shiozawa.
Patent Abstracts of Japan, Publication No. 2001-062704, published Mar. 13, 2001, Mitsuyoshi Ichino et al.

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