Polishing pads with polymer filled fibrous web, and methods...

Plastic and nonmetallic article shaping or treating: processes – Vacuum treatment of work – To degas or prevent gas entrapment

Reexamination Certificate

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C264S139000, C264S255000, C264S257000, C264S258000, C264S324000, C156S245000

Reexamination Certificate

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06989117

ABSTRACT:
A method of making a polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The method comprising placing the fibers and the precursors in a cavity of a mold for shaping the polishing pad; applying a differential pressure across a mold cavity, where the differential pressure and the amount of precursors are sufficient to cause the precursors to fill the interstices substantially completely before completion of the reaction; and applying sufficient heat to the mold to at least partially cure the polishing pad by causing the precursors to react.

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patent: 2002/0077034 (2002-06-01), Tolles

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