Abrading – Rigid tool – Rotary disk
Patent
1998-04-03
2000-02-08
Scherbel, David A.
Abrading
Rigid tool
Rotary disk
451 41, 51298, B24B 100
Patent
active
060222689
ABSTRACT:
This invention describes improved polishing pads useful in the manufacture of semiconductor devices or the like. The pads of the present invention have an advantageous hydrophilic polishing material and have an innovative surface topography and texture which generally improves predictability and polishing performance.
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Cook Lee Melbourne
James David B.
Roberts John V. H.
Benson Kenneth A.
Kaeding Konrad H.
Ojini Anthony
Rodel Holdings Inc.
Scherbel David A.
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