Abrading – Abrading process – Glass or stone abrading
Patent
1994-04-08
1996-02-06
Kisliuk, Bruce M.
Abrading
Abrading process
Glass or stone abrading
451527, 451530, 451537, 51299, 51298, B24B 100
Patent
active
054892333
ABSTRACT:
An improved polishing pad is provided comprising a solid uniform polymer sheet having no intrinsic ability to absorb or transport slurry particles having during use a surface texture or pattern which has both large and small flow channels present simultaneously which permit the transport of slurry across the surface of the polishing pad, where said channels are not part of the material structure but are mechanically produced upon the pad surface. In a preferred version of the invention, the pad texture consists of a macrotexture produced prior to use and a microtexture which is produced by abrasion by a multiplicity of small abrasive points at a regular selected interval during the use of the pad.
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Product Information Sheets on Rodel Suba.TM., Politex.TM. and MH Pads, Rodel, Scottsdale, Arizona, 1992.
Cook Lee M.
Jenkins Charles W.
Pillai Raj R.
Roberts John V. H.
Banks Derris
Benson Kenneth A.
Kisliuk Bruce M.
Rodel Inc.
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