Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate
2007-05-29
2010-10-19
Rachuba, Maurina (Department: 3727)
Abrading
Abrading process
Glass or stone abrading
C451S533000, C451S536000
Reexamination Certificate
active
07815491
ABSTRACT:
The present invention mainly relates to a polishing pad comprising a base material comprising fibers; a membrane with low permeability; a two-component paste formed on the upper surface of the membrane with low permeability for adhering the base material to the membrane with low permeability; and a polyurethane paste formed on the lower surface of the membrane with low permeability. A method of polishing a substrate comprising using the polishing pad and a method for manufacturing the polishing pad as described above are also provided. The polishing pad as mentioned above prevents the polishing pad from detaching from the polishing platen or head. The polishing pad is easy to be replaced without leaving residues on the polishing platen or head.
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Office Action From Chinese Patent Patent Office Correspondingn to Chna (PRC) Patent Application No. 2007101523001 Dated Jun. 19, 2009.
Search report from corresponding ROC (Taiwan) Patent Application No. 096119161.
Feng Chung-Chih
Hung Yung-Chang
Wang Lyang-Gung
Yao I-Peng
Rachuba Maurina
San Feng Chemical Industry Co., Ltd.
Volentine & Whitt PLLC
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