Polishing pad, method of manufacturing glass substrate for...

Details Polishing pad, method of manufacturing glass substrate for... Polishing pad, method of manufacturing glass substrate for...

2006-06-13

2006-06-13

Nguyen, Dung Van (Department: 3723)

Abrading

Flexible-member tool, per se

Laminate

C451S530000

Reexamination Certificate

active

07059951

ABSTRACT:
A polishing pad used for precise polishing of the surface of a lapped glass workpiece when a glass substrate for use in data recording media is manufactured from a glass workpiece. The polishing pad comprises a base and a polishing portion laminated on the base and contacting the surface of the glass workpiece at the time of polishing. The polishing portion is formed of a foam made of a synthetic resin having a 100% modulus of 11.8 MPa or less. A type of parameter representing the surface roughness of the polishing portion, namely, the maximum height (Rmax), is 70 μm or less.

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