Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate
2005-12-13
2005-12-13
Nguyen, Dung Van (Department: 3723)
Abrading
Flexible-member tool, per se
Interrupted or composite work face
C451S921000
Reexamination Certificate
active
06974372
ABSTRACT:
A polishing pad (104, 300, 400, 500) for polishing a wafer (112, 516), or other article. The polishing pad includes a polishing layer (108) containing a plurality of grooves ((148, 152, 156)(304, 308, 324)(404, 408, 424)(520, 524, 528)) having orientations largely parallel to one or more corresponding respective velocity vectors (V1–V4)(V1′–V4′)(V1″–V4″)(V1′″–V4′″) of the wafer. These parallel orientations promote the formation of mixing wakes in a polishing medium (120) within these grooves during polishing.
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Biederman Blake T.
Nguyen Dung Van
Rohm and Haas Electronic Materials CMP Holdings Inc.
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