Polishing pad having grooved window therein and method of...

Details Polishing pad having grooved window therein and method of... Polishing pad having grooved window therein and method of...

2007-08-21

2007-08-21

Shakeri, Hadi (Department: 3723)

Abrading

Flexible-member tool, per se

Interrupted or composite work face

C451S006000

Reexamination Certificate

active

10949048

ABSTRACT:
A polishing pad having grooved window therein is provided. The polishing pad comprises a polishing layer and a window, wherein the polishing layer has at least one first groove therein and the window has at least one second groove therein. More particularly, the first groove is deeper than the second groove. The polishing pad having a grooved window therein has advantages of providing precise endpoint detection and thereby reducing or resolving defect problems.

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patent: WO 01-98028 (2001-12-01), None

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