Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate
2005-05-31
2005-05-31
Nguyen, Dung Van (Department: 3723)
Abrading
Flexible-member tool, per se
Interrupted or composite work face
C451S530000
Reexamination Certificate
active
06899611
ABSTRACT:
A polishing pad used in a method for polishing a semiconductor device is made by combining a polymeric matrix and a dissolvable substance that dissolves upon contact with a polishing slurry.
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Kenkyusha's New English-Japanese Dictionary of Bilinqual Principles, Tokyo, Japan, p. 1807.
Budinger William D.
Jensen Elmer William
McClain Harry George
Reinhardt Heinz F.
Roberts John V. H.
Kita Gerald K.
Nguyen Dung Van
Oh Edwin
Rohm and Haas Electronic Materials CMP Holdings Inc.
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