Semiconductor device manufacturing: process – With measuring or testing
Patent
1996-10-08
1998-04-07
Powell, William
Semiconductor device manufacturing: process
With measuring or testing
156345, 216 84, 216 88, 438 8, 438692, 438747, H01L 2100
Patent
active
057364273
ABSTRACT:
A contour indicator that visually indicates non-uniformities in the planarity of the planarizing surface of a polishing pad. In one embodiment of the invention, a polishing pad has a polishing body with a planarizing surface facing the wafer and a contour indicator embedded in the polishing body. The contour indicator is preferably the material of the polishing body dyed to a color or shade that is visually distinguishable from the polishing body. The contour indicator preferably has first and second sidewalls spaced apart from one another at the planarizing surface of the polishing body, and the contour indicator also has a cross-sectional shape so that the distance between the first and second sidewalls changes with increasing the depth within the pad. In operation, the distance between the first and second sidewalls of the contour indicator changes as material is removed from the planarizing surface, and the distance between the first and second sidewalls at the planarizing surface indicates the contour of the planarizing surface.
REFERENCES:
patent: 4793895 (1988-12-01), Kaanta et al.
patent: 5081421 (1992-01-01), Miller et al.
patent: 5635083 (1997-06-01), Breivogel et al.
Micro)n Technology, Inc.
Powell William
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