Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Composite having voids in a component
Reexamination Certificate
2003-08-26
2009-08-25
Vo, Hai (Department: 1794)
Stock material or miscellaneous articles
Web or sheet containing structurally defined element or...
Composite having voids in a component
C428S319300, C428S319700, C428S143000, C428S147000, C428S402200, C451S527000, C451S533000, C051S296000, C051S297000
Reexamination Certificate
active
07579071
ABSTRACT:
A polishing pad is provided. The polishing pad includes a polishing layer composed of a polymeric matrix and liquid microelements embedded in the polymeric matrix. Open pores defined by the embedded liquid microelements are distributed across a surface of the polishing layer. Due to the microstructural open pores uniformly distributed across a surface of the polishing pad, a polishing operation can be performed at high precision. The polishing pad shows constant polishing performance during the polishing operation, can be stably used, and does not cause a wafer to be scratched. In addition, a method of manufacturing the polishing pad is provided. Since all components used to manufacture the polishing pad are in a liquid phase, manufacturing can be easily performed.
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Huh Hyun
Kim Seung-geun
Lee Sang-Mok
Son Do-Kwon
Song Kee-Cheon
Harness & Dickey & Pierce P.L.C.
Korea Polyol Co., Ltd.
Vo Hai
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