Polishing pad conditioning method and apparatus

Details Polishing pad conditioning method and apparatus Polishing pad conditioning method and apparatus

2005-09-27

2005-09-27

Wilson, Lee D. (Department: 3723)

Abrading

Abrading process

With tool treating or forming

C451S548000

Reexamination Certificate

active

06949012

ABSTRACT:
A method and apparatus is provided that comprises an improved substrate polishing pad conditioning plate. In one embodiment, the conditioning plate contains multiple channels interposed between the abrasive surfaces so as to manage slurry and debris to resist clogging the abrasive surface of the conditioning plate so as to enable conditioning of the polishing pad.

REFERENCES:
patent: 1100612 (1914-06-01), Pointon
patent: 2334642 (1943-11-01), Moore
patent: 2952951 (1960-09-01), Simpson et al.
patent: 3043064 (1962-07-01), Peterson
patent: 3353308 (1967-11-01), Riccardo
patent: 4037367 (1977-07-01), Kruse
patent: 5197249 (1993-03-01), Wiand
patent: 5243790 (1993-09-01), Gagne
patent: 6196911 (2001-03-01), Preston et al.

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