Abrasive tool making process – material – or composition – With synthetic resin
Reexamination Certificate
2007-09-04
2007-09-04
Marcheschi, Michael (Department: 1755)
Abrasive tool making process, material, or composition
With synthetic resin
C051S295000, C051S307000, C051S308000, C051S309000, C051S293000, C451S526000, C451S523000, C451S539000, C451S537000, C451S028000, C523S124000, C523S201000
Reexamination Certificate
active
10705533
ABSTRACT:
The invention is directed to a polishing pad for use in chemical-mechanical polishing comprising a biodegradable polymer. The biodegradable polymer comprises a repeat unit selected from the group consisting of glycolic acid, lactic acid, hydroxyalkanoic acids, hydroxybutyric acid, hydroxyvaleric acid, caprolactone, p-dioxanone, trimethylene carbonate, butylene succinate, butylene adipate, monosaccharides, dicarboxylic acid anhydrides, enantiomers thereof, and combinations thereof. The invention is further directed to methods of its use.
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Borg-Breen Caryn
Cabot Microelectronics Corporation
Marcheschi Michael
Omholt Thomas
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