Polishing pad and method of producing the same

Details Polishing pad and method of producing the same Polishing pad and method of producing the same

2006-08-24

2009-02-10

Rose, Robert (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S533000

Reexamination Certificate

active

07488236

ABSTRACT:
The invention provides a polishing pad by which optical materials such as lenses, reflecting mirrors etc., or materials requiring a high degree of surface planarity, as in the polishing of silicone wafers, glass substrates or aluminum substrates for hard disks, or general metal polishing, can be flattened with stability and high polishing efficiency. The invention also provides a polishing pad for semiconductor wafers, which is superior in planarizing characteristic, is free from scratches and can be produced at low cost. There is provided a polishing pad which is free from dechucking error so that neither damage to wafers nor decrease in operating efficiency occurs. There is provided a polishing pad which is satisfactory in planarity, within wafer uniformity, and polishing rate and produces less change in polishing rate. There is provided a polishing pad which can make planarity improvement and scratch decrease compatible.

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