Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate
2006-10-17
2006-10-17
Hail, III, Joseph J. (Department: 3723)
Abrading
Flexible-member tool, per se
Interrupted or composite work face
C451S041000, C451S286000, C451S287000, C451S288000, C451S526000, C451S529000, C451S539000
Reexamination Certificate
active
07121938
ABSTRACT:
It is provided a polishing pad of novel construction capable of controlling actively and efficiently a slurry flow during polishing a surface of a semiconductor substrate, such as a wafer, thus making it possible to precisely and stably performing a desired polishing process. Onto a surface of a pad substrate12of synthetic resin material, formed is a groove16extending approximately circumferentially. An inner circumferential wall surface20and an outer circumferential wall surface22are made parallel to each other and slant with respect to a center axis18of the pad substrate12.
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Hail III Joseph J.
McDonald Shantese
Oliff & Berridg,e PLC
Toho Engineering Kabushiki Kaisha
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