Abrading – Precision device or process - or with condition responsive... – By optical sensor
Patent
1997-11-12
1999-08-17
Rose, Robert A.
Abrading
Precision device or process - or with condition responsive...
By optical sensor
451288, B24B 722
Patent
active
059385022
ABSTRACT:
A method and device for polishing a substrate capable of accurate detection of a terminating point of polishing employing a polishing pad and a slurry. The polishing device includes a bed formed with a polishing pad on the surface and driven for rotation, a carrier rotatable above the bed and reciprocally movable with respect to the surface of the bed, and holding the substrate to be polished and slurry supply means for supplying a slurry as an abrasive to the surface of the polishing pad. Polishing of the surface of the substrate is performed by the abrasive and the polishing pad while pressing the substrate held by the carrier onto the polishing pad. During polishing, bowing condition of the substrate is detected by means of a bowing detector provided on the carrier to detecting a terminating point of polishing on the basis of bowing condition for stopping polishing operation of respective of the bed, carrier and the slurry supply means.
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patent: 5081796 (1992-01-01), Schultz
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5413941 (1995-05-01), Koos et al.
patent: 5605488 (1997-02-01), Ohashi et al.
patent: 5672091 (1997-09-01), Takahashi et al.
NEC Corporation
Rose Robert A.
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