Polishing method and polishing apparatus

Details Polishing method and polishing apparatus Polishing method and polishing apparatus

1999-02-23

2000-07-18

Butler, Rodney A.

Abrading

Machine

Rotary tool

451269, B24B 700, B24B 500

Patent

active

06089959&

ABSTRACT:
There is provided a polishing apparatus and a polishing method for use with the apparatus. The apparatus includes a lower turn table having a polishing surface on its upper surface, an upper turn table having a polishing surface on its lower surface, and in addition, an intermediate turn table having polishing surfaces on its upper and lower surfaces and interposed between the lower turn table and the upper turn table. The apparatus further includes a carrier rotating mechanism adaptable to rotate a disk-like carrier rotating on its axis while revolve the disk-like carrier around the rotational axis of the turn tables, and a table rotating mechanism for rotating the turn tables. The carriers can be prepared not only on the lower turn table but the intermediate turn table, and works can be loaded on the carriers prepared on the lower and intermediate turn tables. The works polished at a unit of machine operation is so many that productivity is improved.

REFERENCES:
patent: 2291123 (1994-08-01), Wallace
patent: 3774348 (1973-11-01), Dunn
patent: 4665658 (1987-05-01), Carcey
patent: 5140774 (1992-08-01), Onodera
patent: 5333413 (1994-08-01), Hashimoto

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