Polishing method, abrasive material, and polishing apparatus

Details Polishing method, abrasive material, and polishing apparatus Polishing method, abrasive material, and polishing apparatus

1998-04-24

2000-03-21

Rachuba, M.

Abrading

Abrading process

Utilizing fluent abradant

451 41, 451 57, 451 65, 451 66, 451158, 451548, 51295, 51296, 51298, B24B 100, B24B 700, B24B 3300

Patent

active

060396318

ABSTRACT:
Disclosed is a polishing method including the step of: polishing a surface of a member to be polished by rotating and sliding an abrasive wheel holding fixed abrasive grains on the surface of the wheel while supplying free abrasive grains to the surface of the member to be polished; wherein the abrasive wheel is formed by binding the fixed abrasive grains with a soft binder and a pore forming agent. This polishing method is effective to obtain a high flatness of a polished surface and improve surface characteristics of the polished surface, and also to obtain a high continuous-workability by stably keeping a polishing ability for a long period of time.

REFERENCES:
patent: 4927432 (1990-05-01), Budlinger et al.
patent: 5035087 (1991-07-01), Nishiguchi et al.
patent: 5453312 (1995-09-01), Hass et al.
patent: 5492550 (1996-02-01), Krishman et al.
patent: 5503592 (1996-04-01), Neumann
patent: 5549961 (1996-08-01), Hass et al.
patent: 5573447 (1996-11-01), Kozakai et al.

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