Polishing method

Abrading – Abrading process

Patent

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Details

451 59, 451533, 451539, B24B 100

Patent

active

055734448

ABSTRACT:
A surface of a member having intrinsic projections thereon is polished to remove the intrinsic projections. An abrasive tape is formed of a substrate and an abrasive layer formed thereon. The abrasive layer primarily contains abrasive grains and a binder. The abrasive tape and the member are slid in substantially opposite directions with the abrasive layer and the surface of the member kept in contact with each other.

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patent: 5036629 (1991-08-01), Ishikuro et al.
patent: 5042920 (1991-08-01), Yoshino et al.
patent: 5089330 (1992-02-01), Sato et al.
patent: 5209027 (1993-05-01), Ishida et al.

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