Polishing material and method of polishing a surface

Details Polishing material and method of polishing a surface Polishing material and method of polishing a surface

1999-06-08

2000-08-08

Cole, Elizabeth M.

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Composite having voids in a component

4283179, 51308, B24D 1700

Patent

active

060999543

ABSTRACT:
A polishing pad for polishing hard surfaces such as glass and silicon wafers and a method of polishing using such a polishing pad.

REFERENCES:
patent: 4466218 (1984-08-01), Ottman et al.
patent: 4579564 (1986-04-01), Smith

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