Polishing machine with efficient polishing and dressing

Details Polishing machine with efficient polishing and dressing Polishing machine with efficient polishing and dressing

1997-03-18

1999-05-11

Morgan, Eileen P.

Abrading

Abrading process

With tool treating or forming

451 41, 451443, 451287, B24B29/00

Patent

active

059021730

ABSTRACT:
A dresser for dressing a polishing cloth adhered to a platen is provided with different dressing tools such as a lapping tool and a brush disposed around the lapping tool. In polishing, the platen is rotated and a wafer holding unit sucks and holds a wafer to press it against the polishing cloth while the wafer is rotated. In this manner, while polishing is performed, dressing is performed at the same time by pressing the dressing tools of the dresser against the polishing cloth. The brush and lapping tool may be rotated independently, or the dresser may be swung while it is rotated.

REFERENCES:
patent: 4839992 (1989-06-01), Ishida et al.
patent: 5010692 (1991-04-01), Ishida et al.
patent: 5384986 (1995-01-01), Hirose et al.
patent: 5486131 (1996-01-01), Cesna et al.
patent: 5569062 (1996-10-01), Karlsrud
patent: 5626509 (1997-05-01), Hayashi
patent: 5681212 (1997-10-01), Hayakawa et al.

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