Polishing machine and polishing method

Details Polishing machine and polishing method Polishing machine and polishing method

1999-02-19

2000-09-05

Scherbel, David A.

Abrading

Abrading process

Glass or stone abrading

41 36, 41262, B24B 100

Patent

active

061134678

ABSTRACT:
A method of polishing which includes rotatably supporting a workpiece, positioning polishing plates in such a manner that flat surfaces of the polishing plates oppose one another and are in contact with a surface of the workpiece, and polishing the workpiece by rotating the workpiece around a central axis thereof by use of a workpiece rotator. The method also includes reciprocating the polishing plates on the surface of the workpiece in a radial direction of the workpiece while pressing the workpiece between the flat surfaces of the polishing plates.

REFERENCES:
patent: 4588473 (1986-05-01), Hisatomi et al.
patent: 4821466 (1989-04-01), Kato et al.
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5419735 (1995-05-01), Imahashi et al.
patent: 5575706 (1996-11-01), Tsai et al.
patent: 5624300 (1997-04-01), Kishii et al.
Kazuo Kobayashi, et al. "Development of Fully Automatic Precision Polishing (CMP) System", ISAT, Nov. 21, 1998, pp. 97-100.

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