Polishing liquid composition

Details Polishing liquid composition Polishing liquid composition

2006-10-10

2006-10-10

Norton, Nadine (Department: 1765)

Compositions

Etching or brightening compositions

C252S079200, C252S079400, C438S692000

Reexamination Certificate

active

07118685

ABSTRACT:
A polishing liquid composition is applicable as a means of forming embedded metal interconnections on a semiconductor substrate. In a surface to be polished comprising an insulating layer and a metal interconnection layer, the polishing liquid composition is capable of maintaining a polishing speed of the metal layer, of suppressing an etching speed, and of preventing dishing of the metal layer.

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Kriltz, Polishing composition for calcium fluoride—comprises aqueous iron (III) salt solution containing alcohol, English Abstract of DD 249489 A, May 26, 1986, 2 pages.

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