Abrading – Abrading process – Glass or stone abrading
Patent
1999-09-24
2000-07-25
Eley, Timothy V.
Abrading
Abrading process
Glass or stone abrading
251 67, 251288, 251290, B24B 100
Patent
active
060930861
ABSTRACT:
The present invention provides a method of manufacturing an integrated circuit using a polishing head release mechanism. The polishing head release mechanism is for use with a polishing tool having a polishing head and a polishing platen. In one embodiment, the polishing head release mechanism comprises a platen protective shield, shield-to-platen retainers, and retaining clamps. The shield-to-platen retainers are configured to removably couple the platen protective shield to the polishing platen. The retaining clamps are couplable to the platen protective shield and configured to couple the polishing head to the platen protective shield.
REFERENCES:
patent: 5588902 (1996-12-01), Tominaga et al.
patent: 5720653 (1998-02-01), Miller et al.
patent: 5893755 (1999-04-01), Nakayoshi
patent: 6019670 (2000-02-01), Cheng et al.
patent: 6019868 (2000-02-01), Kimura et al.
Easter William G.
Maze John A.
Miceli Frank
Rodriguez Jose O.
Berry Jr. Willie
Eley Timothy V.
Lucent Technologies - Inc.
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