Polishing head elbow fitting

Details Polishing head elbow fitting Polishing head elbow fitting

2007-07-24

2007-07-24

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Machine

Rotary tool

C081S487000

Reexamination Certificate

active

11226013

ABSTRACT:
An improvement is provided for a wafer carrier having an annular inflatable tube for exerting pressure on the edge of a perforated plate during wafer dechucking, and a flexible plastic tube for supplying pressure to the annular inflatable tube. The improvement comprises a fixed elbow fitting secured to said head assembly. The elbow fitting is secured to the head assembly in a predetermined orientation, said orientation being such that said flexible plastic tube will not be obstructed in its path between said fitting and the said inflatable tube and will not obstruct the bellows operation of said wafer carrier. A tool for assisting fitting the fixed orientation elbow fitting in the predetermined orientation. The tool has a planar or substantially planar rigid body with an aperture shaped to accommodate the elbow fitting in one predetermined orientation relative to the tool. Edges of the tool are shaped to bear on features of the polishing head so that at least with the aperture for the fitting in position, the tool is positively located at a predetermined orientation, which, in turn, locates a fitting placed in the aperture in a predetermined orientation, so that it can be fixed in place.

REFERENCES:
patent: 5957007 (1999-09-01), Righini
patent: 2003/0096564 (2003-05-01), Numoto
patent: 2004/0116049 (2004-06-01), Stacklies
patent: 2005/0153635 (2005-07-01), Boo et al.

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