Polishing head and polishing apparatus

Details Polishing head and polishing apparatus Polishing head and polishing apparatus

2005-12-20

2005-12-20

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Machine

Rotary tool

C451S398000

Reexamination Certificate

active

06976908

ABSTRACT:
A polishing head includes a head body, a first recessed portion formed in the lower surface of the head body, a support plate which can be moved up and down in the first recessed portion, a first film-like member in which a first space is formed between the upper surface of the support plate and the head body, a second recessed portion formed in a lower surface of the support plate, a second film-like member, in which a second space is formed between the second film-like member and the support plate, and which holds a wafer on the lower, a communicating hole which is formed in the support plate to communicate the first space with the second space, and a gas supply device which increases pressures in the first and second spaces with a fluid to equal pressures to bring the object into press contact with the polishing pad.

REFERENCES:
patent: 2001/0041522 (2001-11-01), Shendon et al.
patent: 2002/0039879 (2002-04-01), Zuniga et al.
patent: 2000-202762 (2000-07-01), None
patent: 2002-527893 (2002-08-01), None

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