Polishing film and method of producing same

Details Polishing film and method of producing same Polishing film and method of producing same

2005-10-25

2005-10-25

Marcheschi, Michael (Department: 1755)

Abrasive tool making process, material, or composition

With synthetic resin

C427S372200, C427S397700, C427S385500

Reexamination Certificate

active

06958082

ABSTRACT:
A polishing film includes a plastic film and a polishing layer formed on its surface, having a mixture of a first group of silica particles with a first average diameter and a second group of silica particles with a second average diameter fixed in a resin binder, the first average diameter and the second diameter being different from each other and both within a range of 0.001-10 μm. The mixture of the two groups of silica particles has a granularity distribution curve with two peaks at two different diameter values corresponding to the first and second average diameters.

REFERENCES:
patent: 4044185 (1977-08-01), McCaskey, Jr. et al.
patent: 5766277 (1998-06-01), DeVoe et al.
patent: 5942015 (1999-08-01), Culler et al.

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