Polishing end point detection method, polishing end point...

Details Polishing end point detection method, polishing end point... Polishing end point detection method, polishing end point...

2008-12-17

2011-10-25

Evans, Fannie L. (Department: 2877)

Optics: measuring and testing

With plural diverse test or art

C356S406000, C356S369000, C250S226000

Reexamination Certificate

active

08045142

ABSTRACT:
A polishing end point detection method is to detect a polishing end point of a workpiece having a multilayer structure. The method is performed by emitting a first light and a second light to a surface of the workpiece at a first angle of incidence and a second angle of incidence, respectively, receiving the first light and the second light reflected from the surface through a polarizing filter, performing a first analyzing process of analyzing a brightness and a saturation of the surface from the first light received, performing a second analyzing process of analyzing a brightness and a saturation of the surface from the second light received, and determining removal of the upper layer based on changes in the brightness and the saturation of the surface.

REFERENCES:
patent: 6142855 (2000-11-01), Nyui et al.
patent: 7262849 (2007-08-01), Shima et al.
patent: 2001/0036676 (2001-11-01), Mitsuhashi et al.
patent: 2005-294365 (2005-10-01), None
patent: 01/20304 (2001-03-01), None
patent: 01/81902 (2001-11-01), None

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