Abrading – Machine – Rotary tool
Patent
1996-04-16
1997-07-08
Eley, Timothy V.
Abrading
Machine
Rotary tool
451269, 451287, 451290, B24B 717
Patent
active
056454724
ABSTRACT:
A polishing device is formed of a pair of rotatable and elevatable upper supporting members provided with ring shape polishing pads at lower surface peripheries thereof, a pair of rotatable lower supporting members provided with ring shape polishing pads at upper surface peripheries thereof, a rotatable and elevatable disc holding device for holding a disc to be polished, and an arm for supporting the upper supporting members and the disc holding device. The polishing device further includes driving devices for rotating the upper supporting members, the lower supporting members and the disc holding device, respectively. The disc is independently rotated in a direction opposite to a rotating direction of the upper and lower supporting members to improve polishing efficiency. By setting rotating speeds of the supporting members and the disc, a regular working mark can be formed on the disc.
REFERENCES:
patent: 2688215 (1954-09-01), Roshong et al.
patent: 3142137 (1964-07-01), Fallon et al.
patent: 3425169 (1969-02-01), Dunn
patent: 3458957 (1969-08-01), Dunn et al.
patent: 4586296 (1986-05-01), Saunders
Nagahashi Isao
Takahashi Yoshishige
Eley Timothy V.
Speedfam Company Limited
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