Abrasive tool making process – material – or composition – With inorganic material – Clay – silica – or silicate
Reexamination Certificate
2004-04-26
2010-12-21
Green, Anthony J (Department: 1793)
Abrasive tool making process, material, or composition
With inorganic material
Clay, silica, or silicate
C051S307000, C051S309000, C106S003000, C438S692000, C438S693000
Reexamination Certificate
active
07854777
ABSTRACT:
A heterocyclic benzene compound such as benzotriazole, is dissolved in at least one substance selected from the group consisting of a primary alcohol having from 1 to 4 carbon atoms, a glycol having from 2 to 4 carbon atoms, an ether represented by the Formula 2 (wherein m is an integer of from 1 to 4), N-methyl-2-pyrrolidone, N,N-dimethylformamide, dimethyl sulfoxide, γ-butyrolactone and propylene carbonate, and an aqueous dispersion of fine oxide particles which constitute abrasive grains is mixed therewith, whereby a polishing compound is obtained. By use of this polishing compound in polishing a substrate provided with an insulating film2on which a wiring metal film4and a barrier film3are formed, the formation of an embedded wiring5is made possible with low dishing, low erosion and low scratching at a high removal rate.
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Kon Yoshinori
Nakazawa Norihito
Takemiya Satoshi
Asahi Glass Company Limited
Green Anthony J
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Parvini Pegah
Seimi Chemical Co. Ltd.
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