Polishing composition storage container

Details Polishing composition storage container Polishing composition storage container

2006-08-22

2006-08-22

Pham, Minh-Chau T. (Department: 1724)

Liquid purification or separation

Gravitational separator

Mechanical constituent mover

C210S522000, C210S519000, C210S802000, C210S803000, C015S264000, C220S608000, C220S607000, C220S571000

Reexamination Certificate

active

07093722

ABSTRACT:
The invention provides devices and methods for removing and trapping large and/or dense abrasive particles from a polishing slurry. The polishing slurry is introduced into a container and allowed to stagnate, thereby causing large and/or dense particles to separate from the slurry under the influence of gravity. The container includes a cavity or plurality of cavities defined by an inner surface of the container into which the separated particles sink. To prevent the large and/or dense particles from becoming re-suspended into the slurry, the size and shape of the cavity is relatively deep and narrow with respect to the large and/or dense particles, thus providing a trapping effect. The cavities do not effectively trap the smaller particles.

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