Polishing composition including an inhibitor of tungsten etching

Details Polishing composition including an inhibitor of tungsten etching Polishing composition including an inhibitor of tungsten etching

1997-07-28

2000-07-04

Breneman, R. Bruce

Compositions

Etching or brightening compositions

438692, 216 88, C23F 144, C23F 1100

Patent

active

060834196

ABSTRACT:
A chemical mechanical polishing composition comprising a composition capable of etching tungsten and one inhibitor of tungsten etching and methods for using the composition to polish tungsten containing substrates.

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