Polishing composition and polishing method employing it

Details Polishing composition and polishing method employing it Polishing composition and polishing method employing it

2005-01-04

2005-01-04

Kunemund, Robert (Department: 1765)

Compositions

Etching or brightening compositions

C252S079400, C438S692000

Reexamination Certificate

active

06838016

ABSTRACT:
A polishing composition comprising the following components (a) to (g):(a) an abrasive which is at least one member selected from the group consisting of silicon dioxide, aluminum oxide, cerium oxide, zirconium oxide and titanium oxide,(b) a polyalkyleneimine,(c) at least one member selected from the group consisting of guinaldic acid and its derivatives,(d) at least one member selected from the group consisting of glycine, α-alanine, histidine and their derivatives,(e) at least one member selected from the group consisting of benzotriazole and its derivatives,(f) hydrogen peroxide, and(g) water.

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